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Electro Thermal and Electro Statical Actuation of a Surface Micromachined Tunable Fabry-Pérot Filter

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Abstract

We present a surface micromachined electro-thermal as well as electro-statical tunable Fabry-Pérot filter for on wafer mass production. With insertion losses < 1.4 dB (from standard single mode fiber (SSMF) to SSMF) and a tuning range of 112 nm.

© 2011 Optical Society of America

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