A new approach for defect inspection and properties evaluation of ITO conducting glass is demonstrated with OCT. Several parameters also can be estimated including the thickness of glass, refractive index, reflection and transmission coefficients.
© 2011 OSA
(110.4500) Imaging systems : Optical coherence tomography
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.4630) Instrumentation, measurement, and metrology : Optical inspection
M. Tsai and F. Chang, "Optical Inspection of ITO Conducting Glass with Optical Coherence Tomography," in CLEO:2011 - Laser Applications to Photonic Applications, OSA Technical Digest (CD) (Optical Society of America, 2011), paper JWA129.
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