Silicon nanowire arrays realized by depositing thin silver film before etching are demonstrated to have good material and optical properties. They can provide <0.4% antireflection over >1400-nm wavelength range for large-area silicon samples.
© 2011 OSA
Y. Hung, K. Wu, S. Lee, and Y. Pan, "Fabrication and Optical Properties of Aligned Silicon Nanowire Arrays Realized with Thin Silver Film," in CLEO:2011 - Laser Applications to Photonic Applications, OSA Technical Digest (CD) (Optical Society of America, 2011), paper JWA72.
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