We report the first reflection-mode coherent diffraction imaging using a tabletop short wavelength light source. A novel imaging scheme can probe metalic nano-pillar arrays with ~100 nm resolution.
© 2012 OSA
M. D. Seaberg, D. E. Adams, B. Zhang, M. M. Murnane, and H. C. Kapteyn, "Tabletop Reflection Mode Coherent Diffractive Imaging of Periodic Nano-Structures with 100 nm Resolution," in Conference on Lasers and Electro-Optics 2012, OSA Technical Digest (online) (Optical Society of America, 2012), paper CF1L.8.
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