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Conference Paper
CLEO: Science and Innovations
San Jose, California United States
May 6-11, 2012
ISBN: 978-1-55752-943-5
Microresonators I (CM1M)

Angle-etched free-standing photonic crystal nanobeam cavities in single-crystal diamond

Michael J. Burek, Brendan J. Shields, Nathalie P. de Leon, Birgit Hausmann, Yiwen Chu, Qimin Quan, Mikhail D. Lukin, and Marko Loncar  »View Author Affiliations


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A bulk nanomachining technique to realize suspended photonic structures in diamond is presented. The developed fabrication methodology employs oxygen plasma etching and yields free-standing nanobeam waveguides and photonic crystal cavities.

© 2012 OSA

OCIS Codes
(220.1920) Optical design and fabrication : Diamond machining
(220.4241) Optical design and fabrication : Nanostructure fabrication
(160.5298) Materials : Photonic crystals

M. J. Burek, B. J. Shields, N. P. de Leon, B. Hausmann, Y. Chu, Q. Quan, M. D. Lukin, and M. Loncar, "Angle-etched free-standing photonic crystal nanobeam cavities in single-crystal diamond," in Conference on Lasers and Electro-Optics 2012, OSA Technical Digest (online) (Optical Society of America, 2012), paper CM1M.2.

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