A bulk nanomachining technique to realize suspended photonic structures in diamond is presented. The developed fabrication methodology employs oxygen plasma etching and yields free-standing nanobeam waveguides and photonic crystal cavities.
© 2012 OSA
M. J. Burek, B. J. Shields, N. P. de Leon, B. Hausmann, Y. Chu, Q. Quan, M. D. Lukin, and M. Loncar, "Angle-etched free-standing photonic crystal nanobeam cavities in single-crystal diamond," in Conference on Lasers and Electro-Optics 2012, OSA Technical Digest (online) (Optical Society of America, 2012), paper CM1M.2.
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