We report on the use of aluminum nitride (AlN) as an integrated photonic material. One-dimensional grating couplers, waveguides and rings are fabricated in 400 nm polycrystalline AlN films. Single couplers exhibit -6.6 dB peak insertion loss.
© 2012 OSA
S. Ghosh and G. Piazza, "Grating Couplers and Ring Resonator in Aluminum Nitride," in Conference on Lasers and Electro-Optics 2012, OSA Technical Digest (online) (Optical Society of America, 2012), paper CM2M.6.