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Grating Couplers and Ring Resonator in Aluminum Nitride

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Abstract

We report on the use of aluminum nitride (AlN) as an integrated photonic material. One-dimensional grating couplers, waveguides and rings are fabricated in 400 nm polycrystalline AlN films. Single couplers exhibit −6.6 dB peak insertion loss.

© 2012 Optical Society of America

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