We demonstrate for the first time stamp printing of silicon nanomembrane based photonic devices onto flexible substrate utilizing protection layer and suspended configuration. The propagation loss of the transferred waveguide is ~1.1dB/cm.
© 2012 OSA
(130.3120) Integrated optics : Integrated optics devices
(220.4000) Optical design and fabrication : Microstructure fabrication
(220.4241) Optical design and fabrication : Nanostructure fabrication
X. Xu, H. Subbaraman, A. Hosseini, D. Kwong, C. Lin, and R. T. Chen, "Stamp Printing of Silicon Nanomembrane Based Flexible Photonic Devices," in Conference on Lasers and Electro-Optics 2012, OSA Technical Digest (online) (Optical Society of America, 2012), paper CM4A.7.
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