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Optics InfoBase > Conference Papers > CLEO_SI > 2012 > CM4A > Page CM4A.7 © 2012 OSA

Conference Paper
CLEO: Science and Innovations
San Jose, California United States
May 6-11, 2012
ISBN: 978-1-55752-943-5
Silicon Photonics I (CM4A)

Stamp Printing of Silicon Nanomembrane Based Flexible Photonic Devices

Xiaochuan Xu, Harish Subbaraman, Amir Hosseini, David Kwong, Che-Yun Lin, and Ray T. Chen  »View Author Affiliations


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We demonstrate for the first time stamp printing of silicon nanomembrane based photonic devices onto flexible substrate utilizing protection layer and suspended configuration. The propagation loss of the transferred waveguide is ~1.1dB/cm.

© 2012 OSA

OCIS Codes
(130.3120) Integrated optics : Integrated optics devices
(220.4000) Optical design and fabrication : Microstructure fabrication
(220.4241) Optical design and fabrication : Nanostructure fabrication

X. Xu, H. Subbaraman, A. Hosseini, D. Kwong, C. Lin, and R. T. Chen, "Stamp Printing of Silicon Nanomembrane Based Flexible Photonic Devices," in Conference on Lasers and Electro-Optics 2012, OSA Technical Digest (online) (Optical Society of America, 2012), paper CM4A.7.

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