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Conference Paper
CLEO: Science and Innovations
San Jose, California United States
May 6-11, 2012
ISBN: 978-1-55752-943-5
Silicon Photonics III (CTu3I)

Self-aligned Silicon Fins in Metallic Slits as a Platform for Planar Tunable Nanoscale Resonant Photodetectors

Krishna Coimbatore Balram and David A.B. Miller  »View Author Affiliations


http://dx.doi.org/10.1364/CLEO_SI.2012.CTu3I.5


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Abstract

We demonstrate self-aligned fabrication of etched silicon fins in metallic slits and show that this structure supports both dielectric and plasmonic resonances and photodetection that can be tuned by varying the width of the fin

© 2012 OSA

OCIS Codes
(230.5160) Optical devices : Photodetectors
(350.4238) Other areas of optics : Nanophotonics and photonic crystals
(250.5403) Optoelectronics : Plasmonics

Citation
K. Coimbatore Balram and D. A.B. Miller, "Self-aligned Silicon Fins in Metallic Slits as a Platform for Planar Tunable Nanoscale Resonant Photodetectors," in Conference on Lasers and Electro-Optics 2012, OSA Technical Digest (online) (Optical Society of America, 2012), paper CTu3I.5.
http://www.opticsinfobase.org/abstract.cfm?URI=CLEO_SI-2012-CTu3I.5


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