We demonstrate self-aligned fabrication of etched silicon fins in metallic slits and show that this structure supports both dielectric and plasmonic resonances and photodetection that can be tuned by varying the width of the fin
© 2012 OSA
K. Coimbatore Balram and D. A.B. Miller, "Self-aligned Silicon Fins in Metallic Slits as a Platform for Planar Tunable Nanoscale Resonant Photodetectors," in Conference on Lasers and Electro-Optics 2012, OSA Technical Digest (online) (Optical Society of America, 2012), paper CTu3I.5.
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