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Optics InfoBase > Conference Papers > CLEO_SI > 2013 > CF2I > Page CF2I.5 © 2013 OSA

Conference Paper
CLEO: Science and Innovations
San Jose, California United States
June 9-14, 2013
ISBN: 978-1-55752-972-5
Microresonators, Waveguides and their Characterization (CF2I)

CMOS-compatible Titanium Dioxide Deposition for Athermalization of Silicon Photonic Waveguides

Kuanping Shang, Stevan S. Djordjevic, Jun Li, Ling Liao, Juthika Basak, Hai-Feng Liu, and S. J. Ben Yoo  »View Author Affiliations



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Abstract

We discuss titanium dioxide material development for CMOS compatible fabrication and integration of athermal silicon photonic components. Titanium dioxide overclad ring modulators achieved athermal operation (< 0.2 GHz/K).

© 2013 OSA

OCIS Codes
(160.3130) Materials : Integrated optics materials
(230.7370) Optical devices : Waveguides

Citation
K. Shang, S. S. Djordjevic, J. Li, L. Liao, J. Basak, H. Liu, and S. J. B. Yoo, "CMOS-compatible Titanium Dioxide Deposition for Athermalization of Silicon Photonic Waveguides," in CLEO: 2013, OSA Technical Digest (online) (Optical Society of America, 2013), paper CF2I.5.
http://www.opticsinfobase.org/abstract.cfm?URI=CLEO_SI-2013-CF2I.5


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