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Performance enhancement in Quantum Well Infrared Photodetector utilizing the Grating Structure

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Abstract

We fabricate four different size grating structure on the top of the quantum well infrared photodetectors, then etch them into four different etching depth. With suitable design, the peak responsivity of the QWIPs is about thirteen times larger than that of the conventional QWIP.

© 2013 Optical Society of America

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