We demonstrate the first depletion-mode modulators in polysilicon bulk CMOS. They use a new, wiggler-mode microcavity for process compatibility with fully-etched silicon and lateral pn junctions. We show 4.2dB extinction and 60fJ energy/bit at 5Gbps.
© 2013 OSA
J. M. Shainline, J. Orcutt, K. Nammari, M. T. Wade, O. Tehar-Zehav, Z. Sternberg, R. Meade, R. J. Ram, V. Stojanovic, and M. Popovic, "Depletion-mode polysilicon optical modulators in a bulk CMOS process," in CLEO: 2013 Postdeadline, OSA Postdeadline Paper Digest (online) (Optical Society of America, 2013), paper CTh5D.3.
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