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Conference Paper
CLEO: Science and Innovations
San Jose, California United States
June 9-14, 2013
ISBN: 978-1-55752-973-2
Science and Innovation Postdeadline Session II (CTh5D)

Depletion-mode polysilicon optical modulators in a bulk CMOS process

Jeffrey M. Shainline, Jason Orcutt, Kareem Nammari, Mark T. Wade, Ofer Tehar-Zehav, Zvi Sternberg, Roy Meade, Rajeev J. Ram, Vladimir Stojanovic, and Milos Popovic  »View Author Affiliations


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We demonstrate the first depletion-mode modulators in polysilicon bulk CMOS. They use a new, wiggler-mode microcavity for process compatibility with fully-etched silicon and lateral pn junctions. We show 4.2dB extinction and 60fJ energy/bit at 5Gbps.

© 2013 OSA

OCIS Codes
(130.4110) Integrated optics : Modulators
(250.4110) Optoelectronics : Modulators
(130.3990) Integrated optics : Micro-optical devices

J. M. Shainline, J. Orcutt, K. Nammari, M. T. Wade, O. Tehar-Zehav, Z. Sternberg, R. Meade, R. J. Ram, V. Stojanovic, and M. Popovic, "Depletion-mode polysilicon optical modulators in a bulk CMOS process," in CLEO: 2013 Postdeadline, OSA Postdeadline Paper Digest (online) (Optical Society of America, 2013), paper CTh5D.3.

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