Using modulator-generated optical frequency combs we measure the distance to scattering technical surfaces. We achieve measurement errors below 10 µm, a dynamic range of over 37 dB and an acquisition time of 8.3 µs.
© 2013 OSA
(120.2830) Instrumentation, measurement, and metrology : Height measurements
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
C. Weimann, D. Meier, S. Wolf, Y. Schleitzer, M. Totzeck, A. Heinrich, F. Hoeller, J. Leuthold, W. Freude, and C. Koos, "Fast high-precision distance measurements on scattering technical surfaces using frequency combs," in CLEO: 2013, OSA Technical Digest (online) (Optical Society of America, 2013), paper CTu2I.3.