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Conference Paper
CLEO: Science and Innovations
San Jose, California United States
June 8-13, 2014
ISBN: 978-1-55752-999-2
Laser Initiated Self-organization & Patterning (SF1J)

Diffraction-assisted micropatterning of silicon surfaces by ns-laser irradiation

Giovanni Mecalco, Carlos Acosta-Zepeda, Jose Luis Hernandez-Pozos, Nikola Batina, Israel Morales-Reyes, Jörn Bonse, and Emmanuel Haro-Poniatowski  »View Author Affiliations


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Single-pulse (532 nm, 10 ns) micropatterning of silicon surfaces through a pinhole is demonstrated using scanning electron and atomic force microscopy. The results are compared to the Fresnel diffraction theory and physical mechanisms are discussed.

© 2014 OSA

OCIS Codes
(050.0050) Diffraction and gratings : Diffraction and gratings
(140.0140) Lasers and laser optics : Lasers and laser optics
(140.3390) Lasers and laser optics : Laser materials processing

G. Mecalco, C. Acosta-Zepeda, J. L. Hernandez-Pozos, N. Batina, I. Morales-Reyes, J. Bonse, and E. Haro-Poniatowski, "Diffraction-assisted micropatterning of silicon surfaces by ns-laser irradiation," in CLEO: 2014, OSA Technical Digest (online) (Optical Society of America, 2014), paper SF1J.3.

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