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Comparison of VO2 thin films deposited by pulsed laser, electron-beam and sputter deposition

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Abstract

The optical performance and morphology of VO2 thins films deposited by electron beam evaporation, rf magnetron sputtering and pulsed laser deposition are compared. Laser-deposited films are strongly affected by substrate dewetting and epitaxial mismatch.

© 2014 Optical Society of America

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