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Conference Paper
CLEO: Science and Innovations
San Jose, California United States
June 8-13, 2014
ISBN: 978-1-55752-999-2
Advanced Fabrication Techniques (SM1H)

Fabrication of Diffractive Optical Elements with Digital Projection Photochemical Etching

Christopher A. Edwards, Kaiyuan Wang, Benjamin G. Griffin, Renjie Zhou, Basanta Bhaduri, Gabriel Popescu, and Lynford L. Goddard  »View Author Affiliations


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We demonstrate a new fabrication technique called digital projection photochemical etching and apply it to make complicated gray-scale diffractive optical elements, such as a radial sinusoidal grating, in a single processing step.

© 2014 OSA

OCIS Codes
(050.1970) Diffraction and gratings : Diffractive optics
(220.4000) Optical design and fabrication : Microstructure fabrication
(220.4610) Optical design and fabrication : Optical fabrication

C. A. Edwards, K. Wang, B. G. Griffin, R. Zhou, B. Bhaduri, G. Popescu, and L. L. Goddard, "Fabrication of Diffractive Optical Elements with Digital Projection Photochemical Etching," in CLEO: 2014, OSA Technical Digest (online) (Optical Society of America, 2014), paper SM1H.4.

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