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Conferences > CLEO_SI > 2014 > SM3G > SM3G.2

Wideband-Tunable Optical Resonators on Double-Layer SOI Platforms using Electrostatic Actuation

Razi Dehghannasiri, Ali A. Eftekhar, Majid Sodagar, and Ali Adibi

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Abstract

We present mechanically-tunable microdisk resonators using electrostatic actuation in double-layer-SOI material platform. The possibility of achieving resonance wavelength shifts as-high-as 5.5 nm/volt and 1.35 nm/nm over a wavelength tuning range of 35 nm is demonstrated.

© 2014 Optical Society of America

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