Author Affiliations

Xin Liu,^1,5,* Sergei Lebedkin,² Wilhelm Pfleging,^3,4 Heino Besser,^3,4 Markus Wissmann,^4,5 Irina Nazarenko,⁶ Timo Mappes,^5,7 Sebastian Koeber,^5,8 Christian Koos,^5,8 Manfred Kappes,² and Uli Lemmer^1,5

¹Light Technology Institute (LTI), Karlsruhe Institute of Technology, 76128 Karlsruhe, Germany

²Institute of Nanotechnology (INT), Karlsruhe Institute of Technology, 76128 Karlsruhe, Germany

³Institute for Applied Materials - Applied Materials Physics (IAM-AWP), Karlsruhe Institute of Technology, 76128 Karlsruhe, Germany

⁴Karlsruhe Nano Micro Facility, Hermann-von-Helmholtz-Platz 1, 76344 Eggenstein-Leopoldshafen, Germany

⁵Institute of Microstructure Technology (IMT), Karlsruhe Institute of Technology, 76128 Karlsruhe, Germany

⁶Institute for Environmental Health Sciences and Hospital Infection Control, Medical Center-University of Freiburg, 79106 Freiburg, Germany

⁷Carl Zeiss AG, Corporate Research and Technology, 07745 Jena, Germany

⁸Institute of Photonics and Quantum Electronics (IPQ), Karlsruhe Institute of Technology, 76128 Karlsruhe, Germany

^*Corresponding author: xin.liu@kit.edu