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Conference Paper
Computational Optical Sensing and Imaging
Monterey, California United States
June 24-28, 2012
ISBN: 1-55752-947-7
Joint Poster Session (JTu5A)

Step-height measurement by low-coherence interferometry based on wavelet transform

Takamasa Suzuki, Satoshi Atsumi, Osami Sasaki, and Samuel Choi  »View Author Affiliations


http://dx.doi.org/10.1364/AIO.2012.JTu5A.4


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Abstract

This study proposes low-coherence interferometry based on wavelet transform. This method can simultaneously detect the peak position and frequency of a signal. The use of this method for step-height measurement is demonstrated.

© 2012 OSA

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.4825) Instrumentation, measurement, and metrology : Optical time domain reflectometry

Citation
T. Suzuki, S. Atsumi, O. Sasaki, and S. Choi, "Step-height measurement by low-coherence interferometry based on wavelet transform," in Imaging and Applied Optics Technical Papers, OSA Technical Digest (online) (Optical Society of America, 2012), paper JTu5A.4.
http://www.opticsinfobase.org/abstract.cfm?URI=COSI-2012-JTu5A.4


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