OSA's Digital Library

Optics InfoBase > Conference Papers > COSI > 2012 > JTu5A > Page JTu5A.4 © 2012 OSA

Conference Paper
Computational Optical Sensing and Imaging
Monterey, California United States
June 24-28, 2012
ISBN: 1-55752-947-7
Joint Poster Session (JTu5A)

Step-height measurement by low-coherence interferometry based on wavelet transform

Takamasa Suzuki, Satoshi Atsumi, Osami Sasaki, and Samuel Choi  »View Author Affiliations


View Full Text Article

Acrobat PDF (178 KB) Note that full-text PDFs from conferences typically contain 1-3 pages of content, some or all of which might be an abstract, summary, or miscellaneous items.

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

  • Export Citation/Save Click for help


This study proposes low-coherence interferometry based on wavelet transform. This method can simultaneously detect the peak position and frequency of a signal. The use of this method for step-height measurement is demonstrated.

© 2012 OSA

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.4825) Instrumentation, measurement, and metrology : Optical time domain reflectometry

T. Suzuki, S. Atsumi, O. Sasaki, and S. Choi, "Step-height measurement by low-coherence interferometry based on wavelet transform," in Imaging and Applied Optics Technical Papers, OSA Technical Digest (online) (Optical Society of America, 2012), paper JTu5A.4.

Sort:  Journal  |  Reset


References are not available for this paper.

OSA is a member of CrossRef.

CrossCheck Deposited