This study proposes low-coherence interferometry based on wavelet transform. This method can simultaneously detect the peak position and frequency of a signal. The use of this method for step-height measurement is demonstrated.
© 2012 OSA
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.4825) Instrumentation, measurement, and metrology : Optical time domain reflectometry
T. Suzuki, S. Atsumi, O. Sasaki, and S. Choi, "Step-height measurement by low-coherence interferometry based on wavelet transform," in Imaging and Applied Optics Technical Papers, OSA Technical Digest (online) (Optical Society of America, 2012), paper JTu5A.4.
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