Automatic 3D Shape Measurement Noise Reduction for an Optical Profilometer

Song Zhang; David Eisenmann; Scott Chumbley

doi:10.1364/DH.2009.DMC3

Advances in Imaging
OSA Technical Digest (CD) (Optica Publishing Group, 2009),
paper DMC3
•https://doi.org/10.1364/DH.2009.DMC3

Automatic 3D Shape Measurement Noise Reduction for an Optical Profilometer

Song Zhang, David Eisenmann, and Scott Chumbley

Digital Holography and Three-Dimensional Imaging 2009

Vancouver Canada
26–30 April 2009
ISBN: 978-1-55752-871-1

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Metrology by Digital Holography and Profilometry (DMC)

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S. Zhang, D. Eisenmann, and S. Chumbley, "Automatic 3D Shape Measurement Noise Reduction for an Optical Profilometer," in Advances in Imaging, OSA Technical Digest (CD) (Optica Publishing Group, 2009), paper DMC3.

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Abstract

This paper presents a technique to automatically reduce the measurement noise of an optical profilometer. By approximating polynomials line-by-line horizontally and vertically, the bad measurement points are detected and fixed automatically.

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