An optimization algorithm for the design of Fresnel domain computer-generated holograms for lithographic applications is presented. The holograms are fabricated experimentally and their performance characterized. A sensitivity analysis is performed to estimate potential fabrication errors.
© 2009 The Optical Society
(050.0050) Diffraction and gratings : Diffraction and gratings
(050.1380) Diffraction and gratings : Binary optics
(090.0090) Holography : Holography
(090.1760) Holography : Computer holography
J. A. Dominguez-Caballero, S. Takahashi, S. J. Lee, and G. Barbastathis, "Design and Fabrication of Computer Generated Holograms for Fresnel Domain Lithography," in Advances in Imaging, OSA Technical Digest (CD) (Optical Society of America, 2009), paper DWB3.
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