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Conference Paper
Digital Holography and Three-Dimensional Imaging
Vancouver Canada
April 26-30, 2009
ISBN: 978-1-55752-871-1
DH/NTM Joint Session: Digital Holographic Microscopy (JTuA)

Digital Holography for MEMS Application

Anand Asundi and Vijay Raj Singh

http://dx.doi.org/10.1364/DH.2009.JTuA2


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Abstract

Studies on digital holographic microscopy for full field high resolution 3-D profiling of MEMS and micro-devices are presented. Applications for thin film thickness measurement and studies on a MEMS accelerometer are presented.

© 2009 The Optical Society

OCIS Codes
(090.0090) Holography : Holography
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3940) Instrumentation, measurement, and metrology : Metrology
(090.1995) Holography : Digital holography

Citation
A. Asundi and V. R. Singh, "Digital Holography for MEMS Application," in Advances in Imaging, OSA Technical Digest (CD) (Optical Society of America, 2009), paper JTuA2.
http://www.opticsinfobase.org/abstract.cfm?URI=DH-2009-JTuA2


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