Studies on digital holographic microscopy for full field high resolution 3-D profiling of MEMS and micro-devices are presented. Applications for thin film thickness measurement and studies on a MEMS accelerometer are presented.
© 2009 The Optical Society
(090.0090) Holography : Holography
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3940) Instrumentation, measurement, and metrology : Metrology
(090.1995) Holography : Digital holography
A. Asundi and V. R. Singh, "Digital Holography for MEMS Application," in Advances in Imaging, OSA Technical Digest (CD) (Optical Society of America, 2009), paper JTuA2.
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