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Conference Paper
Digital Holography and Three-Dimensional Imaging
Tokyo Japan
May 9-11, 2011
ISBN: 978-1-55752-912-1
Poster Session I (DTuC)

Single-shot normal incidence imaging ellipsometer based on polarized dual-reference wave scheme

Daesuk Kim, Hyunsuk Kim, Dahi Abdelsalam, Dugargaramjav Tserendolgor, and Byunjoon Baek  »View Author Affiliations


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The proposed scheme can provide a very fast solution for featuring the nano pattern 3D objects.

© 2011 OSA

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(090.1995) Holography : Digital holography

D. Kim, H. Kim, D. Abdelsalam, D. Tserendolgor, and B. Baek, "Single-shot normal incidence imaging ellipsometer based on polarized dual-reference wave scheme," in Digital Holography and Three-Dimensional Imaging, OSA Techinal Digest (CD) (Optical Society of America, 2011), paper DTuC24.

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