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Conferences > DOMO > 2000 > DTuC > DTuC2

Maskless nanolithography with diffractive optics: Zone- plate-array lithography (ZPAL)

O. J. D. Carter, Dario Gil, Rajesh Menon, and Henry I. Smith

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Abstract

We present zone-plate-array lithography (ZPAL), a new scheme for nanolithography, which uses a massively parallel array of Fresnel zone plates and micromechanical multiplexing to print patterns in a dot-matrix manner on a substrate.

© 2000 Optical Society of America

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