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Conferences > DOMO > 2002 > DMB > DMB4

Single step fabrication of blazed grating on sol-gel glass with high-energy beam-sensitive grey scale mask

X-C Yuan, W X Yu, W C Cheong, and H J Jiang

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Abstract

We report the single-step fabrication technique using the hybrid sol-gel material with high-energy beam sensitive (HEBS) grey scale mask for low-cost mass production of continuous surface relief micro-optical components.

© 2002 Optical Society of America

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