Characterization of Zone Plates for lithography and Imaging

Rajesh Menon; Darío Gil; D. J. D. Carter; Xudong Tang; Henry I. Smith

doi:10.1364/DOMO.2002.DWA3

Diffractive Optics and Micro-Optics
OSA Trends in Optics and Photonics Series (Optica Publishing Group, 2002),
paper DWA3
•https://doi.org/10.1364/DOMO.2002.DWA3

Characterization of Zone Plates for lithography and Imaging

Rajesh Menon, Darío Gil, D. J. D. Carter, Xudong Tang, and Henry I. Smith

Diffractive Optics and Micro-Optics 2002

Tucson, Arizona United States
3–6 June 2002
ISBN: 1-55752-710-5

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Modeling & Characterization (DWA)

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R. Menon, D. Gil, D. J. D. Carter, X. Tang, and H. I. Smith, "Characterization of Zone Plates for lithography and Imaging," in Diffractive Optics and Micro-Optics, R. Magnusson, ed., Vol. 75 of OSA Trends in Optics and Photonics Series (Optica Publishing Group, 2002), paper DWA3.

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Abstract

We characterize zone plates used for lithography and imaging [6]. Experimental and simulation study of the spatial structure of the zone-plate point-spread functions (PSFs) are conducted.

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