No abstract available.
E. Johnson, J. Sung, and M. Pitchumani, "Aberration measurement of photolithographic lenses using hybrid diffractive photo-masks," in Diffractive Optics and Micro-Optics, R. Magnusson, ed., Vol. 75 of OSA Trends in Optics and Photonics Series (Optical Society of America, 2002), paper JWA3.
References are not available for this paper.