Micro-refractive lenses are critical components in many devices, yet characterization remains challenging. We have developed calibration methods for micro-interferometry to improve form error, transmitted wavefront, and radius of curvature measurements.
© 2004 Optical Society of America
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3940) Instrumentation, measurement, and metrology : Metrology
(350.0350) Other areas of optics : Other areas of optics
(350.3950) Other areas of optics : Micro-optics
A. Davies, B. Bergner, and N. Gardner, "Measurement advances for micro-refractive fabrication," in Frontiers in Optics 2004/Laser Science XXII/Diffractive Optics and Micro-Optics/Optical Fabrication and Testing, OSA Technical Digest (Optical Society of America, 2004), paper XWA2.