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Optics InfoBase > Conference Papers > FTA > 1999 > AP > Page AP5 © 1999 OSA

Conference Paper
Fabrication and Testing of Aspheres
Washington D. C. United States
January 1, 1999
ISBN: 1-55752-557-9
Aspheric Polishing (AP)

Fabrication and testing of aspheres for EUVL

H. Handschuh, G. Seitz, and M. Weiser

http://dx.doi.org/10.1364/FTA.1999.AP5


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No abstract available.

OCIS Codes
(220.3740) Optical design and fabrication : Lithography
(220.4610) Optical design and fabrication : Optical fabrication

Citation
H. Handschuh, G. Seitz, and M. Weiser, "Fabrication and testing of aspheres for EUVL," in Fabrication and Testing of Aspheres, J. Taylor, M. Piscotty, and A. Lindquist, eds., Vol. 24 of OSA Trends in Optics and Photonics (Optical Society of America, 1999), paper AP5.
http://www.opticsinfobase.org/abstract.cfm?URI=FTA-1999-AP5


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