No abstract available.
(130.0130) Integrated optics : Integrated optics
(130.3120) Integrated optics : Integrated optics devices
(350.0350) Other areas of optics : Other areas of optics
(350.3950) Other areas of optics : Micro-optics
J. D. Rogers, T. Tkaczyk, M. R. Descour, and T. R. Christenson, "Characterization and testing of a MEMS scanning grating for structured illumination in a miniature microscope," in Frontiers in Optics, OSA Technical Digest (CD) (Optical Society of America, 2003), paper MN2.
References are not available for this paper.