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Optics InfoBase > Conference Papers > FiO > 2003 > MT > Page MT89 © 2003 OSA

Conference Paper
Frontiers in Optics
Tucson, Arizona United States
October 5, 2003
ISBN: 1-55752-759-8
Poster Session (MT)

Metrology for micro-optics at NIST with μXCALIBIR

Quandou Wang, Ulf Griesmann, and Robert S. Polvani

http://dx.doi.org/10.1364/FIO.2003.MT89


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No abstract available.

OCIS Codes
(220.0220) Optical design and fabrication : Optical design and fabrication
(220.4840) Optical design and fabrication : Testing
(350.0350) Other areas of optics : Other areas of optics
(350.3950) Other areas of optics : Micro-optics

Citation
Q. Wang, U. Griesmann, and R. S. Polvani, "Metrology for micro-optics at NIST with μXCALIBIR," in Frontiers in Optics, OSA Technical Digest (CD) (Optical Society of America, 2003), paper MT89.
http://www.opticsinfobase.org/abstract.cfm?URI=FiO-2003-MT89


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