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Conference Paper
Frontiers in Optics
Tucson, Arizona United States
October 5, 2003
ISBN: 1-55752-759-8
Metrology II (WEE)

Optical measurement of depth and duty cycle for binary diffraction gratings with sub-wavelength features

John R. Marciante, Nestor O. Farmiga, Hieu T. Ta, Jeffrey I. Hirsh, and Michelle S. Evans

http://dx.doi.org/10.1364/FIO.2003.WEE2


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No abstract available.

OCIS Codes
(050.0050) Diffraction and gratings : Diffraction and gratings
(050.1950) Diffraction and gratings : Diffraction gratings
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3940) Instrumentation, measurement, and metrology : Metrology

Citation
J. R. Marciante, N. O. Farmiga, H. T. Ta, J. I. Hirsh, and M. S. Evans, "Optical measurement of depth and duty cycle for binary diffraction gratings with sub-wavelength features," in Frontiers in Optics, OSA Technical Digest (CD) (Optical Society of America, 2003), paper WEE2.
http://www.opticsinfobase.org/abstract.cfm?URI=FiO-2003-WEE2


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