We have derived an analytical expression for the field components in the focal region of a high-numerical-aperture imaging system using the so-called extended Nijboer-Zernike diffraction theory. It will be shown that the transmission function of the imaging system and its aberrations can be derived from the through-focus intensity map.
© 2004 Optical Society of America
(000.3860) General : Mathematical methods in physics
(050.1960) Diffraction and gratings : Diffraction theory
(070.2580) Fourier optics and signal processing : Paraxial wave optics
(110.2990) Imaging systems : Image formation theory
J. Braat, P. Dirksen, A. J. E. M. Janssen, and A. S. van de Nes, "Complex pupil function reconstruction at high NA using the extended Nijboer-Zernike diffraction theory," in Frontiers in Optics 2004/Laser Science XXII/Diffractive Optics and Micro-Optics/Optical Fabrication and Testing, OSA Technical Digest Series (Optical Society of America, 2004), paper FTuG23.
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