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Conference Paper
Frontiers in Optics
Rochester, New York United States
October 12, 2004
ISBN: 1-55752-779-2
FiO Poster Session I (FTuG)

Complex pupil function reconstruction at high NA using the extended Nijboer-Zernike diffraction theory

Joseph Braat, Peter Dirksen, Augustus J.E.M. Janssen, and Arthur S. van de Nes


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We have derived an analytical expression for the field components in the focal region of a high-numerical-aperture imaging system using the so-called extended Nijboer-Zernike diffraction theory. It will be shown that the transmission function of the imaging system and its aberrations can be derived from the through-focus intensity map.

© 2004 Optical Society of America

OCIS Codes
(000.3860) General : Mathematical methods in physics
(050.1960) Diffraction and gratings : Diffraction theory
(070.2580) Fourier optics and signal processing : Paraxial wave optics
(110.2990) Imaging systems : Image formation theory

J. Braat, P. Dirksen, A. J. E. M. Janssen, and A. S. van de Nes, "Complex pupil function reconstruction at high NA using the extended Nijboer-Zernike diffraction theory," in Frontiers in Optics 2004/Laser Science XXII/Diffractive Optics and Micro-Optics/Optical Fabrication and Testing, OSA Technical Digest Series (Optical Society of America, 2004), paper FTuG23.

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