High-resolution real-time infrared microscopy is developed and used for characterization of self-supported polycrystalline SiGe micro-emitter arrays fabricated using a surface micromachining technique. The apparent temperatures exceeding 600 K in CW mode were registered when tested with IR microscope in 8-12 um spectral range at room temperature.
© 2004 Optical Society of America
(220.0220) Optical design and fabrication : Optical design and fabrication
(220.4000) Optical design and fabrication : Microstructure fabrication
(230.0230) Optical devices : Optical devices
(230.3990) Optical devices : Micro-optical devices
V. Malyutenko, O. Malyutenko, V. Leonov, and C. Van Hoof, "Self-heated SiGe microemitter arrays for 8-14 micrometer spectral range," in Frontiers in Optics 2004/Laser Science XXII/Diffractive Optics and Micro-Optics/Optical Fabrication and Testing, OSA Technical Digest Series (Optical Society of America, 2004), paper FWH56.
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