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Conference Paper
Frontiers in Optics
Tucson, Arizona United States
October 16-21, 2005
ISBN: 1-55752-797-0
Polarization Optics and Systems I (FMB)

Design and Implementation of a Nulling Microellipsometer

Alain Tschimwangan and Qiwen Zhan

http://dx.doi.org/10.1364/FIO.2005.FMB2


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Abstract

We report the design and implementation of a radially symmetric microellipsometer using an electro-optical pure polarization rotator. The use of such a circular retarder allows a nulling detection scheme for more accurate measurements.

© 2005 Optical Society of America

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry
(260.0260) Physical optics : Physical optics
(260.5430) Physical optics : Polarization

Citation
A. Tschimwangan and Q. Zhan, "Design and Implementation of a Nulling Microellipsometer," in Frontiers in Optics, OSA Technical Digest Series (Optical Society of America, 2005), paper FMB2.
http://www.opticsinfobase.org/abstract.cfm?URI=FiO-2005-FMB2


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