We report the design and implementation of a radially symmetric microellipsometer using an electro-optical pure polarization rotator. The use of such a circular retarder allows a nulling detection scheme for more accurate measurements.
© 2005 Optical Society of America
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry
(260.0260) Physical optics : Physical optics
(260.5430) Physical optics : Polarization
A. Tschimwangan and Q. Zhan, "Design and Implementation of a Nulling Microellipsometer," in Frontiers in Optics, OSA Technical Digest Series (Optical Society of America, 2005), paper FMB2.
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