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Conferences > FiO > 2005 > FThV > FThV4

Springed Mirror MEMS Optically Addressed Spatial Light Modulator with MegaHertz Response

G. Griffith, B. Haji-saeed, W.D. Goodhue, J. Khoury, C. L. Woods, and J. Kierstead

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Abstract

Fabrication and characterization of an Optically-Addressed-Spatial-Light Modulator (OASLM) with spring-patterned silicon-nitride micromirrors. Combinations of high frequency AC and DC bias voltages drive the device. Frequency response up to 10MHz was measured using a Michelson interferometer.

© 2005 Optical Society of America

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