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Conference Paper
Frontiers in Optics
Tucson, Arizona United States
October 16-21, 2005
ISBN: 1-55752-797-0
Free Space Communications and MEMS (FThV)

One Target Co-Sputtering of Conductive Zinc Oxide

John Kierstead, Roberto Leon, Jed Khoury, Charles L. Woods, Bahareh Haji-Saeed, and William D. Goodhue


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A novel one-target approach for controlling the doping levels in thin ZnO films using a mesh aluminum grid attached to the ZnO target produced a conductive transparent electrode which has significance in optical devices.

© 2005 Optical Society of America

OCIS Codes
(010.1080) Atmospheric and oceanic optics : Active or adaptive optics
(230.0250) Optical devices : Optoelectronics
(230.3990) Optical devices : Micro-optical devices

J. Kierstead, R. Leon, J. Khoury, C. L. Woods, B. Haji-Saeed, and W. D. Goodhue, "One Target Co-Sputtering of Conductive Zinc Oxide," in Frontiers in Optics, OSA Technical Digest Series (Optical Society of America, 2005), paper FThV5.

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