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Conference Paper
Frontiers in Optics
Tucson, Arizona United States
October 16-21, 2005
ISBN: 1-55752-797-0
Aspheric Optics, Manufacturing and Testing I (FTuE)

High-Accuracy Form Measurement with Multiple Sensor Systems

Michael Schulz

http://dx.doi.org/10.1364/FIO.2005.FTuE1


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Abstract

In high-accuracy form measurement, error influences have to be minimized or avoided. Suitably designed multiple sensor systems can be used for this purpose. The principles and systems developed at PTB will be presented.

© 2005 Optical Society of America

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.4800) Instrumentation, measurement, and metrology : Optical standards and testing
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure

Citation
M. Schulz, "High-Accuracy Form Measurement with Multiple Sensor Systems," in Frontiers in Optics, OSA Technical Digest Series (Optical Society of America, 2005), paper FTuE1.
http://www.opticsinfobase.org/abstract.cfm?URI=FiO-2005-FTuE1


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