The accuracy of interferometric tests is limited by systematic aberrations of the setup. For grazing incidence interferometry, calibration methods have been investigated combining a multiple position test with procedures known from metrology in normal incidence.
© 2005 Optical Society of America
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.4800) Instrumentation, measurement, and metrology : Optical standards and testing
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
(220.4840) Optical design and fabrication : Testing
K. Mantel, J. Lamprecht, N. Lindlein, and J. Schwider, "Absolute Testing of a Cylinder Surface in Grazing Incidence," in Frontiers in Optics, OSA Technical Digest Series (Optical Society of America, 2005), paper FTuE3.
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