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Conference Paper
Frontiers in Optics
Tucson, Arizona United States
October 16-21, 2005
ISBN: 1-55752-797-0
Aspheric Optics, Manufacturing and Testing I (FTuE)

Pixelated Mask Spatial Carrier Phase Shifting Interferometry: Algorithms and Associated Errors

Bradley T. Kimbrough and James C. Wyant

http://dx.doi.org/10.1364/FIO.2005.FTuE6


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Abstract

The pixelated mask spatial carrier method for phase shifting interferometry was recently developed by 4D Technology Corp. This paper presents an analysis of errors associated with this technique with a comparison to linear algorithms.

© 2005 Optical Society of America

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.5050) Instrumentation, measurement, and metrology : Phase measurement

Citation
B. T. Kimbrough and J. C. Wyant, "Pixelated Mask Spatial Carrier Phase Shifting Interferometry: Algorithms and Associated Errors," in Frontiers in Optics, OSA Technical Digest Series (Optical Society of America, 2005), paper FTuE6.
http://www.opticsinfobase.org/abstract.cfm?URI=FiO-2005-FTuE6


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