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Conferences > FiO > 2006 > FThK > FThK6

High-Q Silicon Microcavities for Chip Scale Integrated Optics

Mohammad Soltani, Siva Yegnanarayanan, and Ali Adibi

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Abstract

Fabrication and experimental characterization of high Q silicon microdisk resonators with planar-integrated input-output coupling waveguides is reported. Resonator-on-substrate devices are compared with undercut resonators. A record high Q of 0.5×106 for resonator-on-substrate is experimentally measured.

© 2006 Optical Society of America

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