The synthesis method including wave-optics and ray-tracing is developed for the acceleration of simulation of micro-optical systems. Effects of partially coherence and polarization of light source, randomization of micro-lens array parameters and non-paraxiality are considered.
© 2006 Optical Society of America
(260.0260) Physical optics : Physical optics
(260.2110) Physical optics : Electromagnetic optics
(350.0350) Other areas of optics : Other areas of optics
(350.3950) Other areas of optics : Micro-optics
N. I. Petrov, J. Kim, H. Jeong, and D. H. Shin, "Diffraction of Partially-Coherent Light Beams by Micro-Lens Arrays," in Frontiers in Optics, OSA Technical Digest (CD) (Optical Society of America, 2006), paper FTuM2.
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