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Ablation of nanometer-scale features using a table-top soft x-ray laser

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Abstract

Ablation holes 82 nm in diameter were obtained in polymethylmethacrylate. This was realized by using a free-standing zone plate to focus a Ne-like Ar 46.9 nm compact capillary-discharge laser beam onto PMMA-coated samples.

© 2006 Optical Society of America

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