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Conference Paper
Frontiers in Optics
San Jose, California United States
September 16, 2007
ISBN: 1-55752-846-2
Data Reduction Methods and Computational Imaging (FMJ)

Singular Beam Microscopy for Nanoscale Feature Analysis

Boris Spektor, Alexander Normatov, and Joseph Shamir

http://dx.doi.org/10.1364/FIO.2007.FMJ3


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Abstract

Theoretical, numerical, and experimental investigations indicate that the high sensitivity, presented by the interaction of laser beams containing singularities with nanoscale objects, can mitigate classical diffraction limitations. Experimental sensitivity of 20 nm will be presented.

© 2007 Optical Society of America

OCIS Codes
(100.0100) Image processing : Image processing
(100.6640) Image processing : Superresolution
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3940) Instrumentation, measurement, and metrology : Metrology

Citation
B. Spektor, A. Normatov, and J. Shamir, "Singular Beam Microscopy for Nanoscale Feature Analysis," in Frontiers in Optics 2007/Laser Science XXIII/Organic Materials and Devices for Displays and Energy Conversion, OSA Technical Digest (CD) (Optical Society of America, 2007), paper FMJ3.
http://www.opticsinfobase.org/abstract.cfm?URI=FiO-2007-FMJ3


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