Theoretical, numerical, and experimental investigations indicate that the high sensitivity, presented by the interaction of laser beams containing singularities with nanoscale objects, can mitigate classical diffraction limitations. Experimental sensitivity of 20 nm will be presented.
© 2007 Optical Society of America
(100.0100) Image processing : Image processing
(100.6640) Image processing : Superresolution
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3940) Instrumentation, measurement, and metrology : Metrology
B. Spektor, A. Normatov, and J. Shamir, "Singular Beam Microscopy for Nanoscale Feature Analysis," in Frontiers in Optics 2007/Laser Science XXIII/Organic Materials and Devices for Displays and Energy Conversion, OSA Technical Digest (CD) (Optical Society of America, 2007), paper FMJ3.
References are not available for this paper.