Basic components of micro-electron column were assembled with optical alignment and laser bonding. Source and Einzel lenses were aligned with the diffraction method of laser beam and bonded simultaneously by laser welding.
© 2007 Optical Society of America
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.4610) Instrumentation, measurement, and metrology : Optical fabrication
(180.0180) Microscopy : Microscopy
(180.5810) Microscopy : Scanning microscopy
W. K. Jang, S. Park, and H. Kim, "Optical Fabrication of a Micro-Electron Column and Large Area Scanning Application," in Frontiers in Optics 2007/Laser Science XXIII/Organic Materials and Devices for Displays and Energy Conversion, OSA Technical Digest (CD) (Optical Society of America, 2007), paper JSuA5.
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