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Conference Paper
Frontiers in Optics
San Jose, California United States
September 16, 2007
ISBN: 1-55752-846-2
Welcome Reception and Joint FiO/LS Poster Session (JSuA)

Optical Fabrication of a Micro-Electron Column and Large Area Scanning Application

Won K. Jang, Sung-soon Park, and Ho-Seob Kim

http://dx.doi.org/10.1364/FIO.2007.JSuA5


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Abstract

Basic components of micro-electron column were assembled with optical alignment and laser bonding. Source and Einzel lenses were aligned with the diffraction method of laser beam and bonded simultaneously by laser welding.

© 2007 Optical Society of America

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.4610) Instrumentation, measurement, and metrology : Optical fabrication
(180.0180) Microscopy : Microscopy
(180.5810) Microscopy : Scanning microscopy

Citation
W. K. Jang, S. Park, and H. Kim, "Optical Fabrication of a Micro-Electron Column and Large Area Scanning Application," in Frontiers in Optics 2007/Laser Science XXIII/Organic Materials and Devices for Displays and Energy Conversion, OSA Technical Digest (CD) (Optical Society of America, 2007), paper JSuA5.
http://www.opticsinfobase.org/abstract.cfm?URI=FiO-2007-JSuA5


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