We report investigations of atomic layer deposition for 3-D structure modification. Application to opal templates shows that dielectric inversion, large pore structures and conformal backfilling significantly enhance the photonic band gap and optical functionality.
© 2008 The Optical Society
(050.0050) Diffraction and gratings : Diffraction and gratings
(220.0220) Optical design and fabrication : Optical design and fabrication
(220.4241) Optical design and fabrication : Nanostructure fabrication
(050.5298) Diffraction and gratings : Photonic crystals
C. J. Summers, E. Graugnard, D. P. Gaillot, and J. Blair, "Fabrication of Three-Dimensional Photonic Crystals by Templated Atomic Layer Deposition," in Frontiers in Optics 2008/Laser Science XXIV/Plasmonics and Metamaterials/Optical Fabrication and Testing, OSA Technical Digest (CD) (Optical Society of America, 2008), paper FTuP4.
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