Silicon on Insulator (SOI) substrates are widely used in high performance microprocessors and in many other electronic applications. They are also an excellent platform for emerging photonic circuits. Fabrication of SOI will be reviewed here.
© 2008 The Optical Society
G. K. Celler, "Silicon-on-Insulator Technology as a Platform for Advanced Electronics and Photonics," in Frontiers in Optics 2008/Laser Science XXIV/Plasmonics and Metamaterials/Optical Fabrication and Testing, OSA Technical Digest (CD) (Optical Society of America, 2008), paper FTuU4.
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