A compact, integrated silicon-on-insulator optical sensor design based on in-plane diffraction gratings for microfluidic detection of gaseous and liquid analytes is presented and analyzed. Optimization, characterization, and sensitivity analysis are performed with rigorous coupled-wave analysis.
© 2008 The Optical Society
(050.0050) Diffraction and gratings : Diffraction and gratings
(050.1950) Diffraction and gratings : Diffraction gratings
(130.0130) Integrated optics : Integrated optics
(130.6010) Integrated optics : Sensors
J. S. Maikisch and T. K. Gaylord, "A Compact Integrated Chemical/Biological Sensor," in Frontiers in Optics 2008/Laser Science XXIV/Plasmonics and Metamaterials/Optical Fabrication and Testing, OSA Technical Digest (CD) (Optical Society of America, 2008), paper FWT4.
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