A method of using scanning near-field optical microscopy to measure the loss of embedded optical waveguides is presented. The method gives accurate measurement of propagation loss and other parameters characterizing the manufacturing quality of waveguides.
© 2008 The Optical Society
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.4630) Instrumentation, measurement, and metrology : Optical inspection
(180.0180) Microscopy : Microscopy
(180.4243) Microscopy : Near-field microscopy
B. P. Ng, Z. G. Dong, S. W. Kok, Y. Zhang, and Y. C. Soh, "Loss Measurement of Photonic Integrated Waveguides by Scanning Near-field Optical Microscopy," in Frontiers in Optics 2008/Laser Science XXIV/Plasmonics and Metamaterials/Optical Fabrication and Testing, OSA Technical Digest (CD) (Optical Society of America, 2008), paper JWA58.
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