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Conference Paper
Frontiers in Optics
San Jose, California United States
October 11-15, 2009
ISBN: 978-1-55752-878-0
Optical Nonlinear Properties of Materials (FThS)

Modifications in the Optical Properties of Thin Film Oxides with Annealing

Peter Langston, Dinesh Pate, A. Markosyan, Erik Krous, D Nguyen, L Emmert, W Rudolph, R Route, M Fejer, M Shinn, and Carmen Menoni

http://dx.doi.org/10.1364/FIO.2009.FThS7


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Abstract

Post-annealing of HfO<sup>2</sup>and SiO<sup>2</sup>thin films affects the absorption loss at 1 ?m, and the subpicosecond laser breakdown. These effects are explained by modifications in the density of intrinsic defects and photo-induced defects respectively.

© 2009 OSA

OCIS Codes
(310.0310) Thin films : Thin films
(310.6860) Thin films : Thin films, optical properties
(310.6870) Thin films : Thin films, other properties

Citation
P. Langston, D. Pate, A. Markosyan, E. Krous, D. Nguyen, L. Emmert, W. Rudolph, R. Route, M. Fejer, M. Shinn, and C. Menoni, "Modifications in the Optical Properties of Thin Film Oxides with Annealing," in Frontiers in Optics 2009/Laser Science XXV/Fall 2009 OSA Optics & Photonics Technical Digest, OSA Technical Digest (CD) (Optical Society of America, 2009), paper FThS7.
http://www.opticsinfobase.org/abstract.cfm?URI=FiO-2009-FThS7


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