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Conference Paper
Frontiers in Optics
San Jose, California United States
October 11-15, 2009
ISBN: 978-1-55752-878-0
Nanoscale Methods and Instruments II (FThT)

At-Wavelength and Optical Metrology of Bendable X-Ray Optics for Nanofocusing at the ALS

Sheng Yuan, Kenneth Goldberg, Valeriy V. Yashchuk, Richard Celestre, Tony Warwick, Wayne R. McKinney, Gregory Morrison, Senajith B. Rekawa, Iacopo Mochi, and Howard A. Padmore


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We describe a new R&D program at the Advanced Light Source, LBNL, directed to establish both at-wavelength and conventional optical-metrology techniques suitable to characterize the surface profile of super-high-quality x-ray optics with sub-microradian precision.

© 2009 OSA

OCIS Codes
(340.0340) X-ray optics : X-ray optics
(340.7450) X-ray optics : X-ray interferometry

S. Yuan, K. Goldberg, V. V. Yashchuk, R. Celestre, T. Warwick, W. R. McKinney, G. Morrison, S. B. Rekawa, I. Mochi, and H. A. Padmore, "At-Wavelength and Optical Metrology of Bendable X-Ray Optics for Nanofocusing at the ALS," in Frontiers in Optics 2009/Laser Science XXV/Fall 2009 OSA Optics & Photonics Technical Digest, OSA Technical Digest (CD) (Optical Society of America, 2009), paper FThT2.

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